Markets
Semiconductor Manufacturing
Advanced motion control for the
advanced packaging era
Advanced packaging, fueled by the explosive growth of AI, is reshaping the semiconductor equipment industry and rapidly driving the demand for higher levels of motion control performance and capabilities. Among the critical requirements for advanced semiconductor applications are sub-micron accuracy, nanometer-level standstill jitter, millisecond-level settling, and sub-microsecond triggering synchronization.
ACS Motion Control’s unique mix of competencies in advanced servo and AI-based control algorithms, multi-axis EtherCAT-based control systems, motion-to-process synchronization, and high-performance servo drive electronics, enables OEMs to design motion control systems that meet the needs of high-end semiconductor equipment roadmaps.
Key semiconductor applications
- Inspection – optical, X-ray, ultrasonic, e-beam
- Metrology – critical dimension (CD), overlay, film thickness
- Hybrid bonding, die bonding, LED bonding
- Silicon photonics alignment
- Maskless lithography
- Beam delivery
- Nanoprobing
- Vapor deposition
- Ion implant
- Laser scribing and annealing
Precision motion stage control expertise
- Linear motor stages
- Direct drive rotary stages
- XY stages, XYZT stages
- XY gantry stages, dual gantry stages
- Air bearing stages
- Z voice coil stages
- Z-Tip-Tilt stages
- Precision servo and stepper ballscrew stages
Acs Capabilities
Key capabilities for semiconductor applications
Position Event Generation
High speed, on-the-fly event triggering synchronized to precise positioning
ServoBoost & ServoBoost Plus
Improve Motion System Performance with Unique Servo Algorithm
Dynamic Error Compensation
Mechanical accuracy compensation to eliminate system imperfections
Markets
Accelerating motion control solutions & high-tech equipment innovation
Since our founding, ACS Motion Control has thrived on addressing precision motion control challenges in advanced semiconductor process control. Today, we are proud to provide motion control system solutions to equipment manufacturers in several high-tech market segments.
Ultra-precise, high-speed motion coordination
Compact, compliant, high-reliability control solutions
Ultra-precise, high-speed motion coordination
Nanometer stability for critical beam positioning