Dynamic Error Compensation
Mechanical accuracy compensation to eliminate system imperfections
Motion systems, even very high-precision ones, are affected by mechanical imperfections resulting from manufacturing tolerances or thermal sensitivity from unregulated environments. These imperfections can be measured by an external measurement device such as a laser interferometer, vision system, or thermal sensor with analog output and stored in error map tables. ACS motion controllers provide sophisticated error map compensation capabilities to enhance the accuracy of motion stages, whether in motion or standstill.
Key Features
- Compensate for stage alignment, straightness, flatness, orthogonality, and thermal errors
- Table (map) or formula-based compensation
- 1D, 2D, and 3D map tables
- Apply multiple map tables simultaneously
- Interpolate between measured points linearly or with higher-order functions
- Apply mapping to gantries and other multi-axis systems

Relevant Resources
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Accelerating motion control solutions & high-tech equipment innovation
Since our founding, ACS Motion Control has thrived on addressing precision motion control challenges in advanced semiconductor process control. Today, we are proud to provide motion control system solutions to equipment manufacturers in several high-tech market segments.

Ultra-precise, high-speed motion coordination

Compact, compliant, high-reliability control solutions

Ultra-precise, high-speed motion coordination

Nanometer stability for critical beam positioning
